4 inch SiC Wafers 6H Semi-Insulating SiC Substrates akọkọ, iwadii, ati ite idinwon

4 inch SiC Wafers 6H Semi-Insulating SiC Substrates alakoko, iwadii, ati ipele idinwon Aworan Ifihan

Apejuwe kukuru:

Ohun alumọni carbide sobusitireti ologbele-idaabobo ti wa ni akoso nipa gige, lilọ, didan, ninu ati awọn miiran processing ọna ẹrọ lẹhin idagba ti ologbele-idabo ohun alumọni carbide gara. Layer tabi okuta kirisita multilayer ti dagba lori sobusitireti ti o pade awọn ibeere didara bi epitaxy, ati lẹhinna ẹrọ RF makirowefu jẹ nipasẹ apapọ apẹrẹ iyika ati apoti. Wa bi 2inch 3inch 4incgh 6inch 8 inch ise, iwadi ati igbeyewo ite ologbele-idabo silikoni carbide nikan gara sobsitireti.

Fi imeeli ranṣẹ si wa

Alaye ọja

ọja Tags

Ọja Specification

Ipele			Odo MPD Itejade (Ipele Z)			Iwọn Iṣelọpọ Boṣewa(P ite)		Idiwon Ite (D ite)
Iwọn opin			99,5 mm ~ 100,0 mm
	4H-SI		500 μm± 20 μm			500 μm± 25 μm
Wafer Iṣalaye			Pa axis: 4.0° si <1120> ± 0.5° fun 4H-N, Lori ipo: <0001>±0.5° fun 4H-SI
	4H-SI		≤1cm^-2			≤5 cm^-2		≤15 cm^-2
	4H-SI		≥1E9 Ω·cm					≥1E5 Ω·cm
Primary Flat Iṣalaye		{10-10} ±5.0°
Primary Flat Gigun		32,5 mm ± 2,0 mm
Secondary Flat Gigun		18,0 mm ± 2,0 mm
Atẹle Flat Iṣalaye		Silikoni koju soke: 90° CW. lati NOMBA alapin ± 5,0 °
Iyasoto eti		3 mm
LTV/TTV/ Teriba / Warp		≤3 μm/≤5 μm/≤15 μm/≤30 μm						≤10 μm/≤15 μm/≤25 μm/≤40 μm
Irora			C oju				pólándì		Ra≤1 nm
			Si oju	CMP	Ra≤0.2 nm					Ra≤0.5 nm
Eti dojuijako Nipa Ga kikankikan Light		Ko si						Akopọ ipari ≤ 10 mm, ẹyọkan ipari≤2 mm
Hex farahan Nipa High kikankikan Light		Agbegbe akojọpọ ≤0.05%						Agbegbe akojọpọ ≤0.1%
Awọn agbegbe Polytype Nipa Imọlẹ Kikan Giga		Ko si						Agbegbe akojọpọ≤3%
Visual Erogba Ifisi		Agbegbe akojọpọ ≤0.05%						Agbegbe akojọpọ ≤3%
Silicon Surface Scratches Nipa Giga kikankikan Light		Ko si						Àkópọ̀ gigun≤1＊wafer diamita
Eti Chips Ga Nipa kikankikan Light		Ko si idasilẹ ≥0.2 mm fifẹ ati ijinle						5 laaye, ≤1 mm kọọkan
Ohun alumọni dada kontaminesonu Nipa Ga kikankikan		Ko si
Iṣakojọpọ		Kasẹti-wafer pupọ Tabi Apoti Wafer Nikan