8inch SiC Production ite wafer 4H-N SiC sobusitireti

Apejuwe kukuru:

Awọn sobusitireti SiC 8-inch ni a lo ni awọn ẹrọ itanna ti o ni agbara giga, gẹgẹbi agbara MOSFETs (Metal Oxide Semiconductor Field Effect Transistors), awọn diodes Schottky ati awọn ẹrọ semikondokito agbara miiran.

Fi imeeli ranṣẹ si wa

Alaye ọja

ọja Tags

Tabili ti o tẹle fihan awọn pato ti awọn wafers SiC 8inch wa:

8inch N-type SiC DSP Specs
Nọmba	Nkan	Ẹyọ	Ṣiṣejade	Iwadi	Idiwon
1: paramita
1.1	oniruuru	--	4H	4H	4H
1.2	dada iṣalaye	°	<11-20>4±0.5	<11-20>4±0.5	<11-20>4±0.5
2: itanna paramita
2.1	dopant	--	n-iru Nitrogen	n-iru Nitrogen	n-iru Nitrogen
2.2	resistivity	ohm · cm	0.015 ~ 0.025	0.01 ~ 0.03	NA
3: paramita ẹrọ
3.1	opin	mm	200± 0.2	200± 0.2	200± 0.2
3.2	sisanra	μm	500±25	500±25	500±25
3.3	Iṣalaye ogbontarigi	°	[1-100]±5	[1-100]±5	[1-100]±5
3.4	Ogbontarigi Ijinle	mm	1 ~ 1.5	1 ~ 1.5	1 ~ 1.5
3.5	LTV	μm	≤5(10mm*10mm)	≤5(10mm*10mm)	≤10(10mm*10mm)
3.6	TTV	μm	≤10	≤10	≤15
3.7	Teriba	μm	-25-25	-45-45	-65-65
3.8	Ijagun	μm	≤30	≤50	≤70
3.9	AFM	nm	Ra≤0.2	Ra≤0.2	Ra≤0.2
4:Eto
4.1	iwuwo micropipe	ea/cm2	≤2	≤10	≤50
4.2	irin akoonu	awọn ọta / cm2	≤1E11	≤1E11	NA
4.3	TSD	ea/cm2	≤500	≤1000	NA
4.4	BPD	ea/cm2	≤2000	≤5000	NA
4.5	TED	ea/cm2	≤7000	≤10000	NA
5.Front didara
5.1	iwaju	--	Si	Si	Si
5.2	dada pari	--	Si-oju CMP	Si-oju CMP	Si-oju CMP
5.3	patiku	ea/wafer	≤100(iwọn≥0.3μm)	NA	NA
5.4	ibere	ea/wafer	≤5, Lapapọ Gigun≤200mm	NA	NA
5.5	Eti awọn eerun / indents / dojuijako / abawọn / koto	--	Ko si	Ko si	NA
5.6	Awọn agbegbe Polytype	--	Ko si	Agbegbe ≤10%	Agbegbe ≤30%
5.7	iwaju siṣamisi	--	Ko si	Ko si	Ko si
6: Pada didara
6.1	pada pari	--	C-oju MP	C-oju MP	C-oju MP
6.2	ibere	mm	NA	NA	NA
6.3	Ẹyin abawọn eti eerun / indents	--	Ko si	Ko si	NA
6.4	Pada roughness	nm	Ra≤5	Ra≤5	Ra≤5
6.5	Pada siṣamisi	--	Ogbontarigi	Ogbontarigi	Ogbontarigi
7: eti
7.1	eti	--	Chamfer	Chamfer	Chamfer
8: Package
8.1	apoti	--	Epi-setan pẹlu igbale apoti	Epi-setan pẹlu igbale apoti	Epi-setan pẹlu igbale apoti
8.2	apoti	--	Olona-wafer apoti kasẹti	Olona-wafer apoti kasẹti	Olona-wafer apoti kasẹti