Ion Beam Polishing Machine fun oniyebiye SiC Si
Alaye aworan atọka
Ọja Akopọ ti Ion tan ina polishing Machine
Ion Beam Figuring ati ẹrọ didan da lori ilana ti sputtering ion. Ninu iyẹwu igbale ti o ga, orisun ion kan n ṣe pilasima, eyiti o jẹ iyara sinu ina ion agbara-giga. Tan ina yi bombards dada ti paati opiti, yiyọ ohun elo kuro ni iwọn atomiki lati ṣaṣeyọri atunse oju-aye pipe ati ipari.
Gẹgẹbi ilana ti kii ṣe olubasọrọ, ion beam polishing yọkuro aapọn ẹrọ ati yago fun ibajẹ abẹlẹ, ti o jẹ ki o jẹ apẹrẹ fun iṣelọpọ awọn opiti giga-giga ti a lo ninu astronomy, aerospace, semiconductors, ati awọn ohun elo iwadii ilọsiwaju.
Ilana Ṣiṣẹ ti Ion Beam Polishing Machine
Ion Iran
Gaasi inert (fun apẹẹrẹ, argon) ti ṣe sinu iyẹwu igbale ati ionized nipasẹ itusilẹ itanna lati ṣe pilasima.
Isare & Ibiyi tan ina
Awọn ions ti wa ni onikiakia si ọpọlọpọ awọn ọgọrun tabi ẹgbẹrun elekitironi volts (eV) ati ki o ṣe apẹrẹ sinu iduro, aaye tan ina idojukọ.
Yiyọ ohun elo
Tan ina ion ni ti ara sputers awọn ọta lati dada lai pilẹṣẹ kemikali aati.
Wiwa aṣiṣe & Eto Ilana
Awọn iyapa eeya oju oju jẹ iwọn pẹlu interferometry. Awọn iṣẹ yiyọ kuro ni a lo lati pinnu awọn akoko gbigbe ati ṣe agbekalẹ awọn ipa-ọna irinṣẹ iṣapeye.
Atunse Lupu-pipade
Awọn iyika aṣetunṣe ti sisẹ ati wiwọn tẹsiwaju titi awọn ibi-afẹde deede RMS/PV yoo waye.
Key Awọn ẹya ara ẹrọ ti Ion tan ina polishing Machine
Ibamu dada gbogbo- Awọn ilana alapin, iyipo, aspherical, ati awọn oju-ọna ọfẹ
Ultra-idurosinsin Rate yiyọ– Mu ṣiṣẹ atunse olusin sub-nanometer
Bibajẹ-Free Processing- Ko si awọn abawọn subsurface tabi awọn ayipada igbekale
Dédé Performance- Ṣiṣẹ ni deede daradara lori awọn ohun elo ti lile lile
Atunse Igbohunsafẹfẹ Kekere / Alabọde- Imukuro awọn aṣiṣe laisi ipilẹṣẹ agbedemeji / awọn ohun elo igbohunsafẹfẹ giga
Ibeere Itọju Kekere– Gigun lemọlemọfún isẹ ti pẹlu pọọku downtime
Main Technical pato ti Ion tan ina polishing Machine
| Nkan | Sipesifikesonu |
| Ilana Ilana | Ion sputtering ni a ga-igbale ayika |
| Ilana Ṣiṣe | Non-olubasọrọ dada figuring & didan |
| Max Workpiece Iwon | Φ4000 mm |
| Awọn ẹdun išipopada | 3-ipo / 5-apa |
| Iduroṣinṣin Yiyọ | ≥95% |
| Dada Yiye | PV <10 nm; RMS ≤ 0.5 nm (aṣoju RMS <1 nm; PV <15 nm) |
| Agbara Atunse Igbohunsafẹfẹ | Yọ awọn aṣiṣe igbohunsafẹfẹ alabọde kuro lai ṣe afihan awọn aṣiṣe aarin/giga |
| Isẹ ti o tẹsiwaju | Awọn ọsẹ 3-5 laisi itọju igbale |
| Iye owo itọju | Kekere |
Processing Agbara ti Ion tan ina polishing Machine
Atilẹyin dada Orisi
Rọrun: Alapin, iyipo, prism
Complex: Symmetric/asymmetric asphere, pa-axis asphere, cylindrical
Akanse: Awọn opiti tinrin, awọn opiti slat, awọn opiti hemispherical, awọn opiti conformal, awọn awo alakoso, awọn roboto ọfẹ
Awọn ohun elo atilẹyin
Gilasi opitika: Quartz, microcrystalline, K9, ati bẹbẹ lọ.
Awọn ohun elo infurarẹẹdi: Silikoni, germanium, ati bẹbẹ lọ.
Awọn irin: Aluminiomu, irin alagbara, irin alloy titanium, bbl
Awọn kirisita: YAG, carbide silikoni-orin, ati bẹbẹ lọ.
Awọn ohun elo lile / brittle: Silicon carbide, ati bẹbẹ lọ.
Dada Quality / konge
PV <10 nm
RMS ≤ 0.5 nm
Processing Case Studies of Ion tan ina polishing Machine
irú 1 - Standard Flat Mirror
Workpiece: D630 mm kuotisi alapin
Abajade: PV 46.4 nm; RMS 4,63 nm
Case 2 - X-ray Reflective Mirror
Iṣẹ iṣẹ: 150 × 30 mm silikoni alapin
Abajade: PV 8.3 nm; RMS 0.379 nm; Ite 0.13 µrad
Case 3 - Pa-Axis Mirror
Workpiece: D326 mm pa-apa ilẹ digi
Abajade: PV 35.9 nm; RMS 3,9 nm
FAQ ti awọn gilaasi kuotisi
FAQ – Ion tan ina polishing Machine
Q1: Kini ion beam polishing?
A1:Ion beam polishing jẹ ilana ti kii ṣe olubasọrọ ti o nlo ina ti a dojukọ ti awọn ions (gẹgẹbi awọn ions argon) lati yọ ohun elo kuro ni oju-iṣẹ iṣẹ. Awọn ions ti wa ni onikiakia ati itọsọna si oju, nfa yiyọ ohun elo ipele atomiki, ti o yọrisi awọn ipari ni didan. Ilana yii ṣe imukuro aapọn ẹrọ ati ibajẹ subsurface, ti o jẹ ki o jẹ apẹrẹ fun awọn paati opiti deede.
Q2: Iru awọn ipele wo le ṣe ilana Ion Beam Polishing Machine?
A2:AwọnIon tan ina polishing Machinele lọwọ orisirisi awọn roboto, pẹlu o rọrun opitika irinše biawọn ile adagbe, awọn aaye, ati awọn prisms, bi daradara bi eka geometries biaspheres, pa-ipo aspheres, atifreeform roboto. O munadoko paapaa lori awọn ohun elo bii gilasi opiti, awọn opiti infurarẹẹdi, awọn irin, ati awọn ohun elo lile/brittle.
Q3: Awọn ohun elo wo ni Ion Beam Polishing Machine le ṣiṣẹ pẹlu?
A3:AwọnIon tan ina polishing Machinele ṣe didan ọpọlọpọ awọn ohun elo, pẹlu:
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gilasi opitika: kuotisi, microcrystalline, K9, ati be be lo.
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Awọn ohun elo infurarẹẹdi: Silikoni, germanium, ati bẹbẹ lọ.
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Awọn irin: Aluminiomu, irin alagbara, irin, titanium alloy, ati be be lo.
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Awọn ohun elo Crystal: YAG, silikoni carbide ẹyọkan, ati bẹbẹ lọ.
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Miiran lile / brittle ohun elo: Silikoni carbide, ati be be lo.
Nipa re
XKH ṣe amọja ni idagbasoke imọ-ẹrọ giga, iṣelọpọ, ati tita ti gilasi opiti pataki ati awọn ohun elo gara titun. Awọn ọja wa ṣe iranṣẹ ẹrọ itanna opiti, ẹrọ itanna olumulo, ati ologun. A nfun awọn paati opiti Sapphire, awọn ideri lẹnsi foonu alagbeka, Awọn ohun elo amọ, LT, Silicon Carbide SIC, Quartz, ati awọn wafers garawa semikondokito. Pẹlu oye oye ati ohun elo gige-eti, a tayọ ni iṣelọpọ ọja ti kii ṣe deede, ni ero lati jẹ oludari awọn ohun elo optoelectronic ile-iṣẹ giga-imọ-ẹrọ.
