Microjet lesa ẹrọ itanna wafer gige SiC ohun elo processing

Ohun elo imọ-ẹrọ laser Microjet wafer gige awọn ohun elo SiC Ṣiṣe Aworan Aworan

Apejuwe kukuru:

Ohun elo imọ-ẹrọ laser Microjet jẹ iru eto machining pipe ti o ṣajọpọ lesa agbara giga ati ọkọ ofurufu omi ipele micron. Nipa sisopọ tan ina lesa si ọkọ ofurufu omi ti o ga-giga (omi ti a ti sọ diionized tabi omi bibajẹ pataki), sisẹ ohun elo pẹlu iṣedede giga ati ibajẹ kekere le ṣee ṣe. Imọ-ẹrọ yii dara julọ fun gige, liluho ati iṣelọpọ microstructure ti awọn ohun elo lile ati brittle (gẹgẹbi SiC, sapphire, gilasi), ati pe o lo pupọ ni semikondokito, ifihan fọtoelectric, awọn ẹrọ iṣoogun ati awọn aaye miiran.

Fi imeeli ranṣẹ si wa

Alaye ọja

ọja Tags

Ilana iṣẹ:

1. Isopọ lesa: laser pulsed (UV / alawọ ewe / infurarẹẹdi) ti wa ni idojukọ inu ọkọ ofurufu omi lati ṣe ikanni gbigbe agbara ti o duro.

2. Itọsọna Liquid: Jet ti o ga julọ (oṣuwọn sisan 50-200m / s) itutu agbegbe ti n ṣatunṣe ati gbigbe awọn idoti kuro lati yago fun ikojọpọ ooru ati idoti.

3. Iyọkuro ohun elo: Agbara laser nfa ipa cavitation ninu omi lati ṣe aṣeyọri processing tutu ti ohun elo (agbegbe ti o kan ooru <1μm).

4. Iṣakoso agbara: atunṣe akoko gidi ti awọn paramita laser (agbara, igbohunsafẹfẹ) ati titẹ jet lati pade awọn iwulo ti awọn ohun elo ati awọn ẹya oriṣiriṣi.

Awọn paramita bọtini:

1. Agbara lesa: 10-500W (atunṣe)

2. Jet opin: 50-300μm

3.Machining yiye: ± 0.5μm (gige), ijinle si iwọn iwọn 10: 1 (liluho)

Awọn anfani imọ-ẹrọ:

(1) Fere odo ooru bibajẹ
- Liquid jet itutu iṣakoso agbegbe ti o kan ooru (HAZ) si ** <1μm **, yago fun awọn dojuijako micro-cracks ti o ṣẹlẹ nipasẹ sisẹ laser aṣa (HAZ jẹ igbagbogbo> 10μm).

(2) Ultra-ga konge machining
- Ige / liluho deede to ** ± 0.5μm ***, eti roughness Ra <0.2μm, din awọn nilo fun ọwọ polishing.

- Ṣe atilẹyin iṣẹ ṣiṣe eto 3D eka (gẹgẹbi awọn iho conical, awọn iho apẹrẹ).

(3) Ibamu ohun elo jakejado
- Awọn ohun elo lile ati brittle: SiC, safire, gilasi, awọn ohun elo amọ (awọn ọna aṣa jẹ rọrun lati fọ).

- Awọn ohun elo ifarabalẹ ooru: awọn polima, awọn sẹẹli ti ibi (ko si eewu ti denaturation gbona).

(4) Idaabobo ayika ati ṣiṣe
- Ko si idoti eruku, omi le ṣe atunlo ati filtered.

- 30% -50% alekun ni iyara sisẹ (la machining).

(5) Iṣakoso oye
- Iṣọkan wiwo ipo ati iṣapeye paramita AI, sisanra ohun elo imudara ati awọn abawọn.

Awọn alaye imọ-ẹrọ:

Countertop iwọn didun	300300150	400400200
Iwọn ila ila XY	Motor laini. Motor laini	Motor laini. Motor laini
Iwọn ila ila Z	150	200
Ipo deede μm	+/-5	+/-5
Titun ipo deede μm	+/-2	+/-2
Isare G	1	0.29
Iṣakoso nọmba	3 apa / 3+1 apa / 3+2 apa	3 apa / 3+1 apa / 3+2 apa
Išakoso nọmba	DPSS Nd: YAG	DPSS Nd: YAG
Ìgùn nm	532/1064	532/1064
Ti o ni agbara W	50/100/200	50/100/200
Omi oko ofurufu	40-100	40-100
Ọpa titẹ nozzle	50-100	50-600
Awọn iwọn (ọpa ẹrọ) (iwọn * ipari * iga) mm	144519442260	170015002120
Ìwọ̀n (ọ́fíìsì ìdarí) (W * L * H)	70025001600	70025001600
Iwọn (ohun elo) T	2.5	3
àdánù (iṣakoso minisita) KG	800	800
Agbara ṣiṣe	Dada roughness Ra≤1.6um Iyara ṣiṣi ≥1.25mm/s Yiyi gige ≥6mm/s Iyara gige laini ≥50mm/s	Dada roughness Ra≤1.2um Iyara ṣiṣi ≥1.25mm/s Yiyi gige ≥6mm/s Iyara gige laini ≥50mm/s
	Fun gallium nitride gara, olekenka-jakejado band aafo semikondokito ohun elo (diamond/Gallium oxide), Aerospace pataki ohun elo, LTCC erogba seramiki sobusitireti, photovoltaic, scintillator gara ati awọn ohun elo miiran processing. Akiyesi: Agbara sisẹ yatọ da lori awọn abuda ohun elo

Ọran ilana:

Awọn iṣẹ XKH:

XKH pese kan ni kikun ibiti o ti ni kikun aye ọmọ iṣẹ support fun microjet lesa ẹrọ itanna, lati awọn tete ilana idagbasoke ati ẹrọ yiyan ijumọsọrọ, si awọn aarin-oro ti adani eto Integration (pẹlu awọn pataki ibamu ti lesa orisun, ofurufu eto ati adaṣiṣẹ module), si awọn nigbamii isẹ ati ikẹkọ ikẹkọ ati lemọlemọfún ilana ti o dara ju, gbogbo ilana ti wa ni ipese pẹlu ọjọgbọn imọ support egbe; Da lori awọn ọdun 20 ti iriri ẹrọ ṣiṣe deede, a le pese awọn solusan iduro-ọkan pẹlu ijẹrisi ohun elo, iṣafihan iṣelọpọ pupọ ati idahun iyara lẹhin-tita (awọn wakati 24 ti atilẹyin imọ-ẹrọ + ifipamọ awọn ohun elo bọtini) fun awọn ile-iṣẹ oriṣiriṣi bii semikondokito ati iṣoogun, ati ṣe ileri awọn oṣu 12 atilẹyin gigun ati itọju igbesi aye ati iṣẹ igbesoke. Rii daju pe ohun elo alabara nigbagbogbo n ṣetọju iṣẹ ṣiṣe iṣakoso ile-iṣẹ ati iduroṣinṣin.