Ohun alumọni carbide resistance gun ileru gara ti ndagba 6/8/12inch SiC ingot gara PVT ọna

Silicon carbide resistance gun ileru gara ti ndagba 6/8/12inch SiC ingot gara PVT ọna Aworan Ifihan

Apejuwe kukuru:

Ileru idagbasoke ohun alumọni carbide resistance (ọna PVT, ọna gbigbe oru ti ara) jẹ ohun elo bọtini fun idagba ti ohun alumọni carbide (SiC) kirisita ẹyọkan nipasẹ ipilẹ sublimation-recrystallization otutu giga. Imọ-ẹrọ naa nlo alapapo resistance (ara alapapo graphite) lati ṣe ipilẹ ohun elo aise SiC ni iwọn otutu giga ti 2000 ~ 2500 ℃, ati tun ṣe ni agbegbe iwọn otutu kekere (krisita irugbin) lati ṣe agbekalẹ SiC kan-giga didara kan (4H / 6H-SiC). Ọna PVT jẹ ilana akọkọ fun iṣelọpọ ibi-pupọ ti awọn sobusitireti SiC ti awọn inṣi 6 ati ni isalẹ, eyiti o jẹ lilo pupọ ni igbaradi sobusitireti ti awọn semikondokito agbara (bii MOSFETs, SBD) ati awọn ẹrọ igbohunsafẹfẹ redio (GaN-on-SiC).

Fi imeeli ranṣẹ si wa

Awọn ẹya ara ẹrọ

Ilana iṣẹ:

1. Aise ohun elo ikojọpọ: ga ti nw SiC lulú (tabi Àkọsílẹ) gbe ni isalẹ ti lẹẹdi crucible (ga otutu agbegbe).

2. Ayika igbale/inert: igbale iyẹwu ileru (<10⁻³ mbar) tabi kọja gaasi inert (Ar).

3. Sublimation otutu ti o ga: alapapo resistance si 2000 ~ 2500 ℃, SiC decomposition sinu Si, Si₂C, SiC₂ ati awọn paati alakoso gaasi miiran.

4. Gbigbe alakoso gaasi: iwọn otutu ti n ṣaakiri itankale ohun elo alakoso gaasi si agbegbe iwọn otutu kekere (opin irugbin).

5. Idagba Crystal: Ipele gaasi tun ṣe atunṣe lori oju ti Irugbin Crystal ati ki o dagba ni itọsọna itọnisọna pẹlu C-axis tabi A-axis.

Awọn paramita bọtini:

1. Iwọn iwọn otutu: 20 ~ 50 ℃ / cm (iwọn iṣakoso iṣakoso ati iwuwo abawọn).

2. Ipa: 1 ~ 100mbar (titẹ kekere lati dinku isọpọ aimọ).

3.Growth oṣuwọn: 0.1 ~ 1mm / h (ni ipa didara gara ati ṣiṣe iṣelọpọ).

Awọn ẹya akọkọ:

(1) Crystal didara
iwuwo abawọn kekere: iwuwo microtubule <1 cm⁻², iwuwo dislocation 10³ ~ 10⁴ cm⁻² (nipasẹ iṣapeye irugbin ati iṣakoso ilana).

Iṣakoso iru Polycrystalline: le dagba 4H-SiC (akọkọ), 6H-SiC, ipin 4H-SiC> 90% (nilo lati ṣakoso deede iwọn otutu iwọn otutu ati gaasi ipele stoichiometric ratio).

(2) Išẹ ẹrọ
Iduroṣinṣin iwọn otutu: iwọn otutu ara graphite> 2500 ℃, ara ileru gba apẹrẹ idabobo ọpọ-Layer (gẹgẹbi rilara graphite + jaketi tutu omi).

Iṣakoso isokan: Axial / radial otutu sokesile ti ± 5 ° C rii daju aitasera iwọn ila opin gara (6-inch sobusitireti iyapa <5%).

Iwọn ti adaṣe: Eto iṣakoso PLC ti a ṣepọ, ibojuwo akoko gidi ti iwọn otutu, titẹ ati oṣuwọn idagbasoke.

(3) Awọn anfani imọ-ẹrọ
Lilo ohun elo giga: oṣuwọn iyipada ohun elo aise> 70% (dara ju ọna CVD lọ).

Ibamu iwọn nla: iṣelọpọ ibi-6-inch ti waye, 8-inch wa ni ipele idagbasoke.

(4) Lilo agbara ati iye owo
Lilo agbara ti ileru kan jẹ 300 ~ 800kW · h, ṣiṣe iṣiro fun 40% ~ 60% ti idiyele iṣelọpọ ti sobusitireti SiC.

Idoko-owo ohun elo jẹ giga (1.5M 3M fun ẹyọkan), ṣugbọn idiyele sobusitireti ẹyọkan kere ju ọna CVD lọ.

Awọn ohun elo pataki:

1. Awọn ẹrọ itanna agbara: SiC MOSFET sobusitireti fun oluyipada ọkọ ayọkẹlẹ ina ati oluyipada fọtovoltaic.

2. Rf awọn ẹrọ: 5G mimọ ibudo GaN-on-SiC epitaxial sobusitireti (paapa 4H-SiC).

3. Awọn ẹrọ ayika to gaju: iwọn otutu giga ati awọn sensọ titẹ giga fun afẹfẹ afẹfẹ ati ohun elo agbara iparun.

Awọn paramita imọ-ẹrọ:

Sipesifikesonu	Awọn alaye
Awọn iwọn (L × W × H)	2500 × 2400 × 3456 mm tabi ṣe akanṣe
Crucible Opin	900 mm
Gbẹhin Igbale Ipa	6 × 10⁻ Pa (lẹhin wakati 1.5 ti igbale)
Oṣuwọn jijo	≤5 Pa/12h (yan-jade)
Yiyi ọpa Iwọn	50 mm
Iyara Yiyi	0,5-5 rpm
Alapapo Ọna	Alapapo ina resistance
O pọju ileru otutu	2500°C
Alapapo Agbara	40 kW × 2 × 20 kW
Iwọn Iwọn otutu	Pyrometer infurarẹẹdi awọ meji
Iwọn otutu	900-3000°C
Yiye iwọn otutu	±1°C
Ibiti titẹ	1-700 mbar
Titẹ Iṣakoso Yiye	1-10 mbar: ± 0.5% FS; 10-100 mbar: ± 0.5% FS; 100-700 mbar: ± 0.5% FS
Isẹ Iru	Ikojọpọ isalẹ, awọn aṣayan afọwọṣe / adaṣe adaṣe
iyan Awọn ẹya ara ẹrọ	Iwọn iwọn otutu meji, awọn agbegbe alapapo pupọ

Awọn iṣẹ XKH:

XKH n pese gbogbo iṣẹ ilana ti ileru SiC PVT, pẹlu isọdi ohun elo (apẹrẹ aaye gbona, iṣakoso laifọwọyi), idagbasoke ilana (iṣakoso apẹrẹ kirisita, iṣapeye abawọn), ikẹkọ imọ-ẹrọ (isẹ ati itọju) ati atilẹyin lẹhin-tita (awọn apakan graphite rirọpo, isọdọtun aaye gbona) lati ṣe iranlọwọ fun awọn alabara lati ṣaṣeyọri iṣelọpọ ibi-giga giga sic gara. A tun pese awọn iṣẹ iṣagbega ilana lati ni ilọsiwaju nigbagbogbo ikore gara ati ṣiṣe idagbasoke, pẹlu akoko adari aṣoju ti awọn oṣu 3-6.