100mm 4inch GaN lori Sapphire Epi-Layer wafer Gallium nitride epitaxial wafer
Ilana idagbasoke ti GaN blue LED kuatomu eto daradara.Ṣiṣan ilana alaye jẹ bi atẹle
(1) Din iwọn otutu giga, sobusitireti oniyebiye jẹ kikan akọkọ si 1050 ℃ ni oju-aye hydrogen kan, idi ni lati nu dada sobusitireti;
(2) Nigbati iwọn otutu sobusitireti ba lọ silẹ si 510℃, iwọn otutu GaN/AlN ti o ni iwọn kekere pẹlu sisanra ti 30nm ti wa ni ipamọ lori oju ti sobusitireti oniyebiye;
(3) Iwọn otutu dide si 10 ℃, amonia gaasi ifaseyin, trimethylgallium ati silane ti wa ni itasi, lẹsẹsẹ ṣakoso iwọn sisan ti o baamu, ati pe ohun alumọni-doped N-type GaN ti sisanra 4um ti dagba;
(4) Awọn gaasi ifaseyin ti trimethyl aluminiomu ati trimethyl gallium ni a lo lati ṣeto silikoni-doped N-type A⒑ continents pẹlu sisanra ti 0.15um;
(5) 50nm Zn-doped InGaN ti pese sile nipasẹ abẹrẹ trimethylgallium, trimethylindium, diethylzinc ati amonia ni iwọn otutu ti 8O0℃ ati ṣiṣakoso awọn oṣuwọn sisan oriṣiriṣi lẹsẹsẹ;
(6) Awọn iwọn otutu ti pọ si 1020 ℃, trimethylaluminum, trimethylgallium ati bis (cyclopentadienyl) magnẹsia ni abẹrẹ lati ṣeto 0.15um Mg doped P-type AlGaN ati 0.5um Mg doped P-type G glucose ẹjẹ;
(7) Iwọn didara P-iru GaN Sibuyan fiimu ti a gba nipasẹ annealing ni afẹfẹ nitrogen ni 700 ℃;
(8) Etching lori P-type G stasis dada lati fi han N-type G stasis dada;
(9) Evaporation ti Ni/Au olubasọrọ farahan lori p-GANI dada, evaporation ti △/Al olubasọrọ farahan lori ll-GaN dada lati dagba awọn amọna.
Awọn pato
| Nkan | GaN-TCU-C100 | GaN-TCN-C100 |
| Awọn iwọn | e 100 mm ± 0,1 mm | |
| Sisanra | 4.5 ± 0.5 um Le ti wa ni adani | |
| Iṣalaye | C-ofurufu (0001) ± 0,5 ° | |
| Orisi iwa | N-type (Ti ko tii silẹ) | N-type (Si-doped) |
| Atako(300K) | <0.5 Q・cm | <0.05 Q・cm |
| Ifojusi ti ngbe | <5x1017cm-3 | > 1x1018cm-3 |
| Gbigbe | ~ 300 cm2/Vs | ~ 200 cm2/Vs |
| Dislocation iwuwo | O kere ju 5x108cm-2(ṣe iṣiro nipasẹ FWHMs ti XRD) | |
| Sobusitireti be | GaN lori oniyebiye (Iwọn: SSP Aṣayan: DSP) | |
| Agbegbe Dada Lilo | > 90% | |
| Package | Ti kojọpọ ni agbegbe yara mimọ 100 kan, ninu awọn kasẹti ti 25pcs tabi awọn apoti wafer ẹyọkan, labẹ bugbamu nitrogen. | |
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