3 inch Mimo giga (Undoped) Silicon Carbide Wafers ologbele-Idabobo Sic Sobsitireti (HPSl)
Awọn ohun-ini
1. Ti ara ati igbekale Properties
●Iru Ohun elo: Iwa mimọ giga (Undoped) Silicon Carbide (SiC)
●Opin: 3 inches (76.2 mm)
● Sisanra: 0.33-0.5 mm, asefara da lori awọn ibeere ohun elo.
● Ilana Crystal: 4H-SiC polytype pẹlu lattice hexagonal, ti a mọ fun iṣipopada elekitironi giga ati imuduro gbona.
● Iṣalaye:
oStandard: [0001] (C-ofurufu), o dara fun kan jakejado ibiti o ti ohun elo.
oAṣayan: Pa-axis (4° tabi 8° tẹ) fun imudara idagbasoke epitaxial ti awọn fẹlẹfẹlẹ ẹrọ.
●Flatness: Lapapọ iyatọ sisanra (TTV) ● Didara oju:
Ti didan si iwuwo-aibikita oLow (<10/cm² iwuwo micropipe). 2. Awọn ohun-ini Itanna ● Resistivity:> 109 ^ 99 Ω · cm, ti a tọju nipasẹ imukuro awọn dopants ti o ni imọran.
● Agbara Dielectric: Ifarada foliteji giga pẹlu awọn adanu dielectric kekere, apẹrẹ fun awọn ohun elo agbara-giga.
● Imudara Imudaniloju: 3.5-4.9 W / cm · K, ti o mu ki ilọkuro ooru ti o munadoko ni awọn ẹrọ ti o ga julọ.
3. Gbona ati Mechanical Properties
●Wide Bandgap: 3.26 eV, iṣẹ atilẹyin labẹ foliteji giga, iwọn otutu giga, ati awọn ipo itanna giga.
● Lile: Mohs asekale 9, aridaju logan lodi si darí yiya nigba processing.
●Oona Imugboroosi Imugboroosi: 4.2×10−6/K4.2 \ times 10^{-6}/\ text{K}4.2×10−6/K, aridaju ìdúróṣinṣin onisẹpo labẹ awọn iyatọ iwọn otutu.
Paramita | Ipele iṣelọpọ | Iwadi ite | Idiwon ite | Ẹyọ |
Ipele | Ipele iṣelọpọ | Iwadi ite | Idiwon ite | |
Iwọn opin | 76,2 ± 0,5 | 76,2 ± 0,5 | 76,2 ± 0,5 | mm |
Sisanra | 500 ± 25 | 500 ± 25 | 500 ± 25 | µm |
Wafer Iṣalaye | Lori-ipo: <0001> ± 0.5° | Lori-ipo: <0001> ± 2.0° | Lori-ipo: <0001> ± 2.0° | ìyí |
Ìwúwo Micropipe (MPD) | ≤ 1 | ≤ 5 | ≤ 10 | cm-2 ^ -2-2 |
Itanna Resistivity | ≥ 1E10 | ≥ 1E5 | ≥ 1E5 | Ω·cm |
Dopant | Undoped | Undoped | Undoped | |
Primary Flat Iṣalaye | {1-100} ± 5.0° | {1-100} ± 5.0° | {1-100} ± 5.0° | ìyí |
Primary Flat Gigun | 32.5 ± 3.0 | 32.5 ± 3.0 | 32.5 ± 3.0 | mm |
Secondary Flat Gigun | 18.0 ± 2.0 | 18.0 ± 2.0 | 18.0 ± 2.0 | mm |
Atẹle Flat Iṣalaye | 90° CW lati alapin akọkọ ± 5.0° | 90° CW lati alapin akọkọ ± 5.0° | 90° CW lati alapin akọkọ ± 5.0° | ìyí |
Iyasoto eti | 3 | 3 | 3 | mm |
LTV / TTV / Teriba / Warp | 3 / 10 / ± 30 / 40 | 3 / 10 / ± 30 / 40 | 5/15 / ±40/45 | µm |
Dada Roughness | Si-oju: CMP, C-oju: didan | Si-oju: CMP, C-oju: didan | Si-oju: CMP, C-oju: didan | |
Awọn dojuijako (Imọlẹ giga-giga) | Ko si | Ko si | Ko si | |
Awọn Awo Hex (Imọlẹ-kikankikan) | Ko si | Ko si | Agbegbe akopọ 10% | % |
Awọn agbegbe Polytype (Imọlẹ-kikankikan) | Agbegbe akopọ 5% | Agbegbe akopọ 20% | Agbegbe akopọ 30% | % |
Awọn idọti (Imọlẹ-kikankikan) | ≤ 5 scratches, akojo ipari ≤ 150 | ≤ 10 scratches, akojo ipari ≤ 200 | ≤ 10 scratches, akojo ipari ≤ 200 | mm |
Chipping eti | Ko si ≥ 0.5 mm fifẹ/ijinle | 2 laaye ≤ 1 mm iwọn / ijinle | 5 laaye ≤ 5 mm iwọn / ijinle | mm |
Idoti Dada | Ko si | Ko si | Ko si |
Awọn ohun elo
1. Electronics agbara
Bandgap jakejado ati iṣiṣẹ igbona giga ti awọn sobusitireti HPSI SiC jẹ ki wọn jẹ apẹrẹ fun awọn ẹrọ agbara ti n ṣiṣẹ ni awọn ipo to gaju, bii:
● Awọn ẹrọ giga-giga: Pẹlu MOSFETs, IGBTs, ati Schottky Barrier Diodes (SBDs) fun iyipada agbara daradara.
● Awọn ọna Agbara Isọdọtun: Bii awọn inverters oorun ati awọn olutona turbine.
● Awọn ọkọ ayọkẹlẹ Itanna (EVs): Ti a lo ninu awọn inverters, ṣaja, ati awọn ọna ṣiṣe agbara lati mu ilọsiwaju ṣiṣẹ ati dinku iwọn.
2. RF ati Awọn ohun elo Makirowefu
Atako giga ati awọn adanu dielectric kekere ti awọn wafers HPSI jẹ pataki fun igbohunsafẹfẹ redio (RF) ati awọn eto makirowefu, pẹlu:
● Awọn amayederun Ibaraẹnisọrọ: Awọn ibudo ipilẹ fun awọn nẹtiwọki 5G ati awọn ibaraẹnisọrọ satẹlaiti.
● Aerospace ati Aabo: Awọn ọna ẹrọ Radar, awọn eriali ti o ni ipele-ipele, ati awọn eroja avionics.
3. Optoelectronics
Iṣalaye ati bandgap jakejado ti 4H-SiC jẹ ki lilo rẹ ni awọn ẹrọ optoelectronic, bii:
●UV Photodetectors: Fun ayika ibojuwo ati egbogi aisan.
● Awọn LED Agbara-giga: Atilẹyin awọn eto ina-ipinle ti o lagbara.
● Awọn Diodes Laser: Fun awọn ohun elo ile-iṣẹ ati iṣoogun.
4. Iwadi ati Idagbasoke
Awọn sobusitireti HPSI SiC jẹ lilo pupọ ni ẹkọ ati awọn ile-iṣẹ R&D ile-iṣẹ fun ṣawari awọn ohun-ini ohun elo ilọsiwaju ati iṣelọpọ ẹrọ, pẹlu:
● Idagbasoke Layer Epitaxial: Awọn ẹkọ lori idinku abawọn ati iṣapeye Layer.
● Awọn Iwadi Iṣipopada ti ngbe: Iwadi ti itanna ati gbigbe iho ni awọn ohun elo mimọ-giga.
● Afọwọkọ: Idagbasoke akọkọ ti awọn ẹrọ aramada ati awọn iyika.
Awọn anfani
Didara to gaju:
Iwa mimọ giga ati iwuwo abawọn kekere pese ipilẹ ti o gbẹkẹle fun awọn ohun elo to ti ni ilọsiwaju.
Iduroṣinṣin Ooru:
Awọn ohun-ini ifasilẹ ooru ti o dara julọ gba awọn ẹrọ laaye lati ṣiṣẹ daradara labẹ agbara giga ati awọn ipo iwọn otutu.
Ibamu gbooro:
Awọn iṣalaye ti o wa ati awọn aṣayan sisanra aṣa ṣe idaniloju ibamu fun ọpọlọpọ awọn ibeere ẹrọ.
Iduroṣinṣin:
Lile Iyatọ ati iduroṣinṣin igbekalẹ dinku yiya ati abuku lakoko sisẹ ati iṣẹ.
Ilọpo:
Dara fun ọpọlọpọ awọn ile-iṣẹ, lati agbara isọdọtun si afẹfẹ afẹfẹ ati awọn ibaraẹnisọrọ.
Ipari
3-inch High Purity Semi-Insulating Silicon Carbide wafer duro fun ṣonṣo ti imọ-ẹrọ sobusitireti fun agbara giga, igbohunsafẹfẹ giga, ati awọn ẹrọ optoelectronic. Ijọpọ rẹ ti igbona ti o dara julọ, itanna, ati awọn ohun-ini ẹrọ ṣe idaniloju iṣẹ igbẹkẹle ni awọn agbegbe nija. Lati itanna agbara ati awọn eto RF si optoelectronics ati R&D ilọsiwaju, awọn sobusitireti HPSI wọnyi pese ipilẹ fun awọn imotuntun ọla.
Fun alaye diẹ sii tabi lati paṣẹ, jọwọ kan si wa. Ẹgbẹ imọ-ẹrọ wa wa lati pese itọnisọna ati awọn aṣayan isọdi ti a ṣe deede si awọn iwulo rẹ.