4H-N/6H-N SiC Wafer Reasearch gbóògì Idiwon ite Dia150mm Silicon carbide sobusitireti
6 inch iwọn ila opin ohun alumọni carbide (SiC) sipesifikesonu sobusitireti
Ipele | Odo MPD | Ṣiṣejade | Iwadi ite | Idiwon ite |
Iwọn opin | 150.0mm ± 0.25mm | |||
Sisanra | 4H-N | 350um± 25um | ||
4H-SI | 500um± 25um | |||
Wafer Iṣalaye | Lori ipo: <0001> ± 0.5 ° fun 4H-SI | |||
Alapin akọkọ | {10-10}±5.0° | |||
Primary Flat Gigun | 47.5mm ± 2.5mm | |||
Iyasoto eti | 3mm | |||
TTV / Teriba / Warp | ≤15um/≤40um/≤60um | |||
Iwuwo Micropipe | ≤1cm-2 | ≤5cm-2 | ≤15cm-2 | ≤50cm-2 |
Resistivity 4H-N 4H-SI | 0.015 ~ 0.028Ω! cm | |||
≥1E5Ω!cm | ||||
Irora | Polish Ra ≤1nm CMP Ra≤0.5nm | |||
# Awọn dojuijako nipasẹ ina kikankikan giga | Ko si | 1 laaye,≤2mm | Akopọ ipari ≤10mm, ipari kan≤2mm | |
* Awọn awo Hex nipasẹ ina kikankikan giga | Agbegbe akojọpọ ≤1% | Agbegbe akojọpọ ≤ 2% | Agbegbe akojọpọ ≤ 5% | |
* Awọn agbegbe polytype nipasẹ ina kikankikan giga | Ko si | Agbegbe akojọpọ ≤ 2% | Agbegbe akojọpọ ≤ 5% | |
*&Scratches nipasẹ ina kikankikan giga | 3 scratches to 1 x wafer opin akojo ipari | 5 scratches to 1 x wafer opin akojo ipari | 5scratches to 1 x wafer iwọn ila opin akojo ipari | |
Chip eti | Ko si | 3 laaye, ≤0.5mm kọọkan | 5 laaye, ≤1mm kọọkan | |
Idoti nipasẹ ina kikankikan giga | Ko si
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Tita & Onibara Service
Awọn ohun elo rira
Ẹka rira awọn ohun elo jẹ iduro lati ṣajọ gbogbo awọn ohun elo aise ti o nilo lati gbejade ọja rẹ. Itọpa pipe ti gbogbo awọn ọja ati awọn ohun elo, pẹlu kemikali ati itupalẹ ti ara wa nigbagbogbo.
Didara
Lakoko ati lẹhin iṣelọpọ tabi ẹrọ ti awọn ọja rẹ, ẹka iṣakoso didara ni ipa ninu rii daju pe gbogbo awọn ohun elo ati awọn ifarada pade tabi kọja sipesifikesonu rẹ.
Iṣẹ
A ni igberaga ara wa ni nini awọn oṣiṣẹ imọ-ẹrọ tita pẹlu awọn iriri ọdun 5 ju ni ile-iṣẹ semikondokito. Wọn ti ni ikẹkọ lati dahun awọn ibeere imọ-ẹrọ bakannaa pese awọn agbasọ akoko fun awọn iwulo rẹ.
a wa ni ẹgbẹ rẹ nigbakugba ti o ba ni iṣoro, ati yanju rẹ ni awọn wakati 10.