4H/6H-P 6inch SiC wafer Zero MPD ite Isejade Ite idinwon

4H/6H-P 6inch SiC wafer Zero MPD grade Production Ite Idiwon Ite Ifihan Aworan

Apejuwe kukuru:

4H / 6H-P iru 6-inch SiC wafer jẹ ohun elo semikondokito ti a lo ninu iṣelọpọ ẹrọ itanna, ti a mọ fun adaṣe igbona ti o dara julọ, foliteji didenukole giga, ati resistance si awọn iwọn otutu giga ati ipata. Ipele iṣelọpọ ati Zero MPD (Micro Pipe Defect) ṣe idaniloju igbẹkẹle rẹ ati iduroṣinṣin ni awọn ẹrọ itanna agbara ti o ga julọ. Awọn wafer ti iṣelọpọ ni a lo fun iṣelọpọ ẹrọ iwọn-nla pẹlu iṣakoso didara okun, lakoko ti awọn wafers-ipin ni akọkọ lo fun n ṣatunṣe aṣiṣe ilana ati idanwo ohun elo. Awọn ohun-ini iyalẹnu ti SiC jẹ ki o lo ni iwọn otutu giga, foliteji giga, ati awọn ẹrọ itanna igbohunsafẹfẹ giga, gẹgẹbi awọn ẹrọ agbara ati awọn ẹrọ RF.

Fi imeeli ranṣẹ si wa

Alaye ọja

ọja Tags

4H/6H-P Iru SiC Composite Substrates Wọpọ tabili paramita

6 inch opin Silicon Carbide (SiC) sobusitireti Sipesifikesonu

Ipele			Odo MPD ProductionIpele (Z Ipò)	Standard ProductionIwọn (P Ipò)	Idiwon ite (D Ipò)
Iwọn opin			145,5 mm ~ 150,0 mm
Sisanra			350 μm ± 25 μm
Wafer Iṣalaye			-Offapa: 2.0°-4.0°si [1120] ± 0.5° fun 4H/6H-P, Lori ipo: 〈111〉± 0.5° fun 3C-N
Iwuwo Micropipe			0 cm-2
Resistivity	p-iru 4H/6H-P		≤0.1 Ωꞏcm		≤0.3 Ωꞏcm
	n-iru 3C-N		≤0.8 mΩꞏcm		≤1 m Ωꞏcm
Primary Flat Iṣalaye		4H/6H-P	-{1010} ± 5.0°
		3C-N	-{110} ± 5.0°
Primary Flat Gigun			32,5 mm ± 2,0 mm
Secondary Flat Gigun			18,0 mm ± 2,0 mm
Atẹle Flat Iṣalaye			Silikoni koju soke: 90° CW. lati NOMBA alapin ± 5,0 °
Iyasoto eti			3 mm		6 mm
LTV/TTV/ Teriba / Warp			≤2.5 μm/≤5 μm/≤15 μm/≤30 μm		≤10 μm/≤15 μm/≤25 μm/≤40 μm
Irora			Polish Ra≤1 nm
			CMP Ra≤0.2 nm		Ra≤0.5 nm
Eti dojuijako Nipa High kikankikan Light			Ko si		Akopọ gigun ≤ 10 mm, ipari kan≤2 mm
Hex farahan Nipa High kikankikan Light			Agbegbe akojọpọ ≤0.05%		Agbegbe akojọpọ ≤0.1%
Awọn agbegbe Polytype Nipa Imọlẹ Kikan Giga			Ko si		Agbegbe akojọpọ≤3%
Visual Erogba Ifisi			Agbegbe akojọpọ ≤0.05%		Agbegbe akojọpọ ≤3%
Silicon Surface Scratches Nipa Giga kikankikan Light			Ko si		Àkópọ̀ gígùn≤1×ìwọ̀n òpin wafer
Eti Chips Ga Nipa kikankikan Light			Ko si idasilẹ ≥0.2mm fifẹ ati ijinle		5 laaye, ≤1 mm kọọkan
Ohun alumọni dada kontaminesonu Nipa Ga kikankikan			Ko si
Iṣakojọpọ			Kasẹti-wafer pupọ tabi Apoti Wafer Nikan

Awọn akọsilẹ:

※ Awọn opin awọn abawọn lo si gbogbo oju wafer ayafi fun agbegbe iyasoto eti. # Awọn idọti yẹ ki o ṣayẹwo lori Si oju o

Iru 4H/6H-P 6-inch SiC wafer pẹlu ipele Zero MPD ati iṣelọpọ tabi iwọn idinwon jẹ lilo pupọ ni awọn ohun elo itanna to ti ni ilọsiwaju. Iwa eleto gbona ti o dara julọ, foliteji didenukole giga, ati resistance si awọn agbegbe lile jẹ ki o jẹ apẹrẹ fun ẹrọ itanna agbara, gẹgẹbi awọn iyipada foliteji giga ati awọn oluyipada. Iwọn MPD Zero ṣe idaniloju awọn abawọn to kere, pataki fun awọn ẹrọ igbẹkẹle-giga. Awọn wafer-iṣelọpọ ni a lo ni iṣelọpọ iwọn nla ti awọn ẹrọ agbara ati awọn ohun elo RF, nibiti iṣẹ ṣiṣe ati konge ṣe pataki. Dummy-grade wafers, ni ida keji, ni a lo fun isọdiwọn ilana, idanwo ohun elo, ati adaṣe, ṣiṣe iṣakoso didara deede ni awọn agbegbe iṣelọpọ semikondokito.

Awọn anfani ti N-type SiC composite substrates pẹlu

Ga Gbona Conductivity: Awọn 4H / 6H-P SiC wafer daradara ti npa ooru kuro, o jẹ ki o dara fun iwọn otutu ati awọn ohun elo itanna ti o ga julọ.
Ga didenukole Foliteji: Agbara rẹ lati mu awọn foliteji giga laisi ikuna jẹ ki o jẹ apẹrẹ fun awọn ẹrọ itanna agbara ati awọn ohun elo iyipada-giga.
Odo MPD (Micro Pipe abawọn) ite: Iwọn abawọn abawọn ti o kere julọ ṣe idaniloju igbẹkẹle ti o ga julọ ati iṣẹ, pataki fun wiwa awọn ẹrọ itanna.
Gbóògì-Ipele fun Ibi iṣelọpọ: Dara fun iṣelọpọ titobi nla ti awọn ẹrọ semikondokito iṣẹ-giga pẹlu awọn iṣedede didara okun.
Idiwon-Ite fun Igbeyewo ati odiwọn: Nṣiṣẹ iṣapeye ilana, idanwo ohun elo, ati iṣapẹrẹ laisi lilo awọn iye owo-giga iṣelọpọ-ite wafers.

Lapapọ, 4H/6H-P 6-inch SiC wafers pẹlu iwọn Zero MPD, ipele iṣelọpọ, ati iwọn idinwon nfunni ni awọn anfani pataki fun idagbasoke awọn ẹrọ itanna to gaju. Awọn wafer wọnyi jẹ anfani paapaa ni awọn ohun elo ti o nilo iṣiṣẹ iwọn otutu giga, iwuwo agbara giga, ati iyipada agbara daradara. Iwọn MPD Zero ṣe idaniloju awọn abawọn ti o kere julọ fun iṣẹ ẹrọ ti o gbẹkẹle ati iduroṣinṣin, lakoko ti awọn wafers-iṣelọpọ ṣe atilẹyin iṣelọpọ iwọn-nla pẹlu awọn iṣakoso didara to muna. Dummy-grade wafers pese ojutu ti o munadoko-owo fun iṣapeye ilana ati isọdiwọn ohun elo, ṣiṣe wọn ṣe pataki fun iṣelọpọ semikondokito to gaju.