8inch 200mm Silicon Carbide SiC Wafers 4H-N iru Gbóògì 500um sisanra

Apejuwe kukuru:

Shanghai Xinkehui Tech.Co., Ltd nfunni ni yiyan ti o dara julọ ati awọn idiyele fun awọn wafers carbide silikoni didara ati awọn sobusitireti to awọn diamita 8inch pẹlu awọn iru idabobo N- ati ologbele.Awọn ile-iṣẹ ẹrọ semikondokito kekere ati nla ati awọn ile-iṣẹ iwadii ni kariaye lo ati gbarale awọn wafers carbide silikoni wa.

Fi imeeli ranṣẹ si wa

Alaye ọja

ọja Tags

200mm 8inch SiC sobusitireti Specification

Iwọn: 8inch;

Iwọn opin: 200mm± 0.2;

Sisanra: 500um± 25;

Iṣalaye oju: 4 si [11-20] ± 0.5 °;

Iṣalaye ogbontarigi: [1-100]±1°;

Ijinle ogbontarigi: 1 ± 0.25mm;

Gbohungbohun: <1cm2;

Awọn Awo Hex: Ko si Gbigbanilaaye;

Resistivity: 0.015 ~ 0.028Ω;

EPD: <8000cm2;

TED: <6000cm2

BPD: <2000cm2

TSD: <1000cm2

SF: agbegbe <1%

TTV≤15um;

Warp≤40um;

Teriba≤25um;

Awọn agbegbe Poly: ≤5%;

Scratch: <5 ati Gigun Apejọ< 1 Diamita Wafer;

Chips/Indents: Ko si iyọọda D> 0.5mm Iwọn ati Ijin;

Awọn dojuijako: Kò;

Abawọn: Ko si

Wafer eti: Chamfer;

Ipari Ilẹ: Polish Double Side, Si Face CMP;

Iṣakojọpọ: Kasẹti-wafer pupọ Tabi Apoti Wafer Kanṣoṣo;

Awọn iṣoro lọwọlọwọ ni igbaradi ti awọn kirisita akọkọ 200mm 4H-SiC

1) Igbaradi ti awọn kirisita irugbin 200mm 4H-SiC ti o ga julọ;

2) Aaye iwọn otutu ti o tobi ti kii ṣe iṣọkan ati iṣakoso ilana iparun;

3) Awọn gbigbe ṣiṣe ati itankalẹ ti gaseous irinše ni largeize gara idagbasoke awọn ọna šiše;

4) Crystal cracking ati abawọn abawọn ti o ṣẹlẹ nipasẹ iwọn ti o tobi ju wahala iwọn otutu.

Lati bori awọn italaya wọnyi ati gba didara 200mm SiC waferssolutions ti wa ni dabaa:

Ni awọn ofin ti 200mm irugbin gara igbaradi, aaye ṣiṣan iwọn otutu ti o yẹ, ati apejọ ti o pọ si ni a ṣe iwadi ati ti a ṣe apẹrẹ lati mu didara gara gara ati iwọn ti o pọ si;Bibẹrẹ pẹlu 150mm SiC se: d crystal, gbejade aṣetunṣe irugbin gara lati faagun SiC cristasize ni diėdiė titi yoo fi de 200mm;Nipasẹ idagbasoke kirisita pupọ ati ilana ilana, ṣe ilọsiwaju didara gara ni agbegbe ti o npo kirisita, ki o mu didara awọn kirisita irugbin 200mm dara.

Ni awọn ofin ti 200mm kirisita conductive ati igbaradi sobusitireti, iwadii ti iṣapeye iwọn otutu feld ati apẹrẹ aaye ṣiṣan fun iwọn kristali nla, ṣe idagbasoke 200mm conductive SiC crystal, ati iṣakoso isokan doping.Lẹhin sisẹ ti o ni inira ati ṣiṣe apẹrẹ ti gara, 8-inchelectrically conductive 4H-SiC ingot pẹlu iwọn ila opin kan ni a gba.Lẹhin gige, lilọ, didan, sisẹ lati gba SiC 200mm wafers pẹlu sisanra ti 525um tabi bẹ bẹ