Dia300x1.0mmt Sisanra oniyebiye Wafer C-ọkọ ofurufu SSP/DSP
Agbekale ti wafer apoti
| Awọn ohun elo Crystal | 99,999% ti Al2O3, Iwa mimọ giga, Monocrystalline, Al2O3 | |||
| Crystal didara | Awọn ifisi, awọn ami idilọwọ, awọn ibeji, Awọ, awọn nyoju-kekere ati awọn ile-iṣẹ pipinka ko si | |||
| Iwọn opin | 2inch | 3inch | 4inch | 6inch ~ 12inch |
| 50.8± 0.1mm | 76.2 ± 0.2mm | 100 ± 0.3mm | Ni ibamu pẹlu awọn ipese ti boṣewa gbóògì | |
| Sisanra | 430± 15µm | 550± 15µm | 650± 20µm | Le ṣe adani nipasẹ alabara |
| Iṣalaye | C-ofurufu (0001) to M-ofurufu (1-100) tabi A-ofurufu (1 1-2 0) 0,2 ± 0.1 ° / 0,3 ± 0.1 °, R-ofurufu (1-1 0 2), A-ofurufu. (1 1-2 0), M-ofurufu (1-1 0 0), Eyikeyi Iṣalaye, Eyikeyi igun | |||
| Ipari alapin akọkọ | 16.0 ± 1mm | 22.0 ± 1.0mm | 32,5 ± 1,5 mm | Ni ibamu pẹlu awọn ipese ti boṣewa gbóògì |
| Primary alapin Iṣalaye | A-ofurufu (1 1-2 0) ± 0,2 ° | |||
| TTV | ≤10µm | ≤15µm | ≤20µm | ≤30µm |
| LTV | ≤10µm | ≤15µm | ≤20µm | ≤30µm |
| TIR | ≤10µm | ≤15µm | ≤20µm | ≤30µm |
| teriba | ≤10µm | ≤15µm | ≤20µm | ≤30µm |
| Ijagun | ≤10µm | ≤15µm | ≤20µm | ≤30µm |
| Iwaju Iwaju | Epi-Dandan (Ra<0.2nm) | |||
* Teriba: Iyapa ti aaye aarin ti agbedemeji agbedemeji ti ọfẹ, wafer ti ko ni ihamọ lati ọkọ ofurufu itọkasi, nibiti ọkọ ofurufu itọkasi ti ṣalaye nipasẹ awọn igun mẹta ti igun onigun mẹta.
* Warp: Iyatọ laarin iwọn to pọ julọ ati awọn aaye to kere julọ ti dada agbedemeji ti wafer ọfẹ, ti ko ni clamped lati ọkọ ofurufu itọkasi asọye loke.
Awọn ọja ati iṣẹ ti o ni agbara giga fun awọn ẹrọ semikondokito iran atẹle ati idagbasoke epitaxial:
Iwọn giga ti flatness (TTV iṣakoso, ọrun, warp ati bẹbẹ lọ)
Didara didara to gaju (idoti patiku kekere, idoti irin kekere)
Liluho sobusitireti, grooving, gige, ati didan ẹhin
Asomọ data gẹgẹbi mimọ ati apẹrẹ ti sobusitireti (iyan)
Ti o ba ni iwulo fun awọn sobusitireti safire, jọwọ lero ọfẹ lati kan si:
meeli:eric@xkh-semitech.com+86 158 0194 2596 /doris@xkh-semitech.com+86 187 0175 6522
A yoo pada si ọ ni kete!
Alaye aworan atọka
