Ohun elo Idagba Sapphire Ingot Ọna Czochralski CZ fun Ṣiṣejade 2inch-12inch Wafers oniyebiye

Apejuwe kukuru:

Awọn Ohun elo Idagba Sapphire Ingot (Ọna Czochralski) jẹ eto gige-eti ti a ṣe apẹrẹ fun mimọ-giga, aipe alailewu oniyebiye oniyebiye ẹyọkan. Ọna Czochralski (CZ) n jẹ ki iṣakoso kongẹ ti iyara fifa irugbin gara (0.5-5 mm/h), iwọn yiyi (5-30 rpm), ati awọn iwọn otutu iwọn otutu ni iridium crucible, ti n ṣe awọn kirisita axisymmetric to 12 inches (300 mm) ni iwọn ila opin. Ohun elo yii ṣe atilẹyin iṣakoso iṣalaye gara C/A-ọkọ ofurufu, ti n mu idagbasoke ti ipele opitika, ipele itanna, ati safire doped (fun apẹẹrẹ, Cr³⁺ ruby, Ti³⁺ irawọ oniyebiye).

XKH n pese awọn solusan opin-si-opin, pẹlu isọdi ohun elo (iṣelọpọ wafer 2 – 12-inch), iṣapeye ilana (iwuwo abawọn <100/cm²), ati ikẹkọ imọ-ẹrọ, pẹlu iṣelọpọ oṣooṣu ti 5,000+ wafers fun awọn ohun elo bii awọn sobusitireti LED, GaN epitaxy, ati apoti semikondokito.


Awọn ẹya ara ẹrọ

Ilana Ṣiṣẹ

Ọna CZ n ṣiṣẹ nipasẹ awọn igbesẹ wọnyi:
1. Awọn ohun elo Raw Didi: Al₂O₃ ti o ga julọ (mimọ> 99.999%) ti wa ni yo ni iridium crucible ni 2050-2100°C.
2. Irugbin Crystal Ifarahan: A ti sọ kirisita irugbin kan silẹ sinu yo, ti o tẹle pẹlu fifa ni kiakia lati ṣe ọrun kan (iwọn ila opin <1 mm) lati mu imukuro kuro.
3. Ipilẹ ejika ati Idagba nla: Iyara fifa naa dinku si 0.2-1 mm/h, ni diėdiẹ ti o pọ si iwọn ila opin gara si iwọn ibi-afẹde (fun apẹẹrẹ, 4-12 inches).
4. Annealing ati Itutu agbaiye: A ti tutu kirisita ni 0.1-0.5 ° C / min lati dinku wahala-iṣan ti o gbona.
5. Awọn oriṣi Crystal ibaramu:
Ipele Itanna: Awọn sobusitireti Semikondokito (TTV <5 μm)
Ipele Opitika: Awọn window lesa UV (gbigbe>90%@200 nm)
Awọn iyatọ Doped: Ruby (Idojukọ Cr³⁺ 0.01-0.5 wt.%), ọpọn oniyebiye bulu

Mojuto System irinše

1. Eto yo
Iridium Crucible: Sooro si 2300°C, sooro ipata, ni ibamu pẹlu awọn yo nla (100-400 kg).
Ileru Alapapo Idawọle: iṣakoso iwọn otutu olominira agbegbe pupọ (± 0.5°C), awọn gradients igbona ti iṣapeye.

2. Nfa ati Yiyi System
Mọto Servo Di-giga: Iwọn fifa 0.01 mm/h, ifọkansi iyipo <0.01 mm.
Igbẹhin omi Oofa: Gbigbe ti kii ṣe olubasọrọ fun idagbasoke ti nlọsiwaju (> wakati 72).

3. Eto iṣakoso igbona
Iṣakoso Pipade-Loop PID: Atunse agbara-akoko gidi (50-200 kW) lati mu aaye igbona duro.
Idaabobo Gaasi Inert: Adalu Ar/N₂ (99.999% mimọ) lati ṣe idiwọ ifoyina.

4. Adaṣiṣẹ ati Abojuto
Abojuto Iwọn Iwọn CCD: Awọn esi akoko gidi (ipe ± 0.01 mm).
Thermography infurarẹẹdi: Ṣe abojuto mofoloji ni wiwo olomi to lagbara.

CZ vs KY Ọna lafiwe

Paramita Ọna CZ Ọna KY
O pọju. Iwọn Crystal 12 inches (300 mm) 400 mm (ingot ti o ni apẹrẹ pia)
Àìpé àbùkù <100/cm² <50/cm²
Iwọn idagbasoke 0,5-5 mm / h 0.1-2 mm / h
Lilo Agbara 50-80 kWh / kg 80-120 kWh / kg
Awọn ohun elo LED sobsitireti, GaN epitaxy Awọn window opitika, awọn ingots nla
Iye owo Iwọntunwọnsi (Idoko-owo ohun elo giga) Giga (ilana eka)

Awọn ohun elo bọtini

1. Ile-iṣẹ Semikondokito
Awọn sobusitireti GaN Epitaxial: 2-8-inch wafers (TTV <10 μm) fun Micro-LEDs ati diodes laser.
Awọn Wafers SOI: Irẹjẹ oju oju <0.2 nm fun awọn eerun-iṣọpọ 3D.

2. Optoelectronics
Windows Laser UV: Duro iwuwo agbara 200 W/cm² fun awọn opiti lithography.
Awọn ohun elo infurarẹẹdi: olùsọdipúpọ gbigba <10⁻³ cm⁻¹ fun aworan igbona.

3. Electronics onibara
Awọn ideri Kamẹra Foonuiyara: Mohs lile 9, 10× ilọsiwaju resistance lati ibere.
Awọn ifihan smartwatch: Sisanra 0.3-0.5 mm, gbigbe> 92%.

4. Aabo ati Aerospace
Windows Reactor Iparun: Ifarada Radiation to 10¹⁶ n/cm².
Awọn digi Laser Agbara giga: Ibajẹ gbona <λ/20@1064 nm.

Awọn iṣẹ XKH

1. Isọdi ohun elo
Apẹrẹ Iyẹwu ti iwọn: Φ200-400 awọn atunto mm fun iṣelọpọ wafer 2–12-inch.
Irọrun Doping: Ṣe atilẹyin fun aye to ṣọwọn (Er/Yb) ati irin-iyipada (Ti/Cr) doping fun awọn ohun-ini optoelectronic ti a ṣe.

2. Ipari-si-Ipari Atilẹyin
Iṣapejuwe ilana: Awọn ilana ti a fọwọsi tẹlẹ (50+) fun LED, awọn ẹrọ RF, ati awọn paati-itọsi-lile.
Nẹtiwọọki Iṣẹ Agbaye: Awọn iwadii latọna jijin 24/7 ati itọju lori aaye pẹlu atilẹyin ọja oṣu 24 kan.

3. Sisale ọna
Ṣiṣẹda Wafer: Bibẹ, lilọ, ati didan fun awọn wafers 2–12-inch (C/A-plane).
Awọn ọja ti a fi kun iye:
Awọn ohun elo opitika: Awọn window UV/IR (sisanra 0.5-50 mm).
Awọn ohun elo Igi Jewelry: Cr³⁺ ruby ​​(GIA-ifọwọsi), Ti³⁺ irawọ oniyebiye.

4. Imọ olori
Awọn iwe-ẹri: EMI-ni ifaramọ wafers.
Awọn itọsi: Awọn itọsi mojuto ni isọdọtun ọna CZ.

Ipari

Ohun elo ọna CZ n pese ibaramu iwọn-nla, awọn oṣuwọn abawọn kekere-kekere, ati iduroṣinṣin ilana giga, ti o jẹ ki o jẹ aami ile-iṣẹ fun LED, semikondokito, ati awọn ohun elo aabo. XKH n pese atilẹyin okeerẹ lati imuṣiṣẹ ohun elo si iṣelọpọ lẹhin-idagbasoke, ṣiṣe awọn alabara laaye lati ṣaṣeyọri iye owo-doko, ṣiṣe iṣelọpọ gara oniyebiye oniyebiye.

Ileru idagba oniyebiye 4
Ileru idagba oniyebiye 5

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