Ohun elo Idagba Sapphire Ingot Ọna Czochralski CZ fun Ṣiṣejade 2inch-12inch Wafers oniyebiye
Ilana Ṣiṣẹ
Ọna CZ n ṣiṣẹ nipasẹ awọn igbesẹ wọnyi:
1. Awọn ohun elo Raw Didi: Al₂O₃ ti o ga julọ (mimọ> 99.999%) ti wa ni yo ni iridium crucible ni 2050-2100°C.
2. Irugbin Crystal Ifarahan: A ti sọ kirisita irugbin kan silẹ sinu yo, ti o tẹle pẹlu fifa ni kiakia lati ṣe ọrun kan (iwọn ila opin <1 mm) lati mu imukuro kuro.
3. Ipilẹ ejika ati Idagba nla: Iyara fifa naa dinku si 0.2-1 mm/h, ni diėdiẹ ti o pọ si iwọn ila opin gara si iwọn ibi-afẹde (fun apẹẹrẹ, 4-12 inches).
4. Annealing ati Itutu agbaiye: A ti tutu kirisita ni 0.1-0.5 ° C / min lati dinku wahala-iṣan ti o gbona.
5. Awọn oriṣi Crystal ibaramu:
Ipele Itanna: Awọn sobusitireti Semikondokito (TTV <5 μm)
Ipele Opitika: Awọn window lesa UV (gbigbe>90%@200 nm)
Awọn iyatọ Doped: Ruby (Idojukọ Cr³⁺ 0.01-0.5 wt.%), ọpọn oniyebiye bulu
Mojuto System irinše
1. Eto yo
Iridium Crucible: Sooro si 2300°C, sooro ipata, ni ibamu pẹlu awọn yo nla (100-400 kg).
Ileru Alapapo Idawọle: iṣakoso iwọn otutu olominira agbegbe pupọ (± 0.5°C), awọn gradients igbona ti iṣapeye.
2. Nfa ati Yiyi System
Mọto Servo Di-giga: Iwọn fifa 0.01 mm/h, ifọkansi iyipo <0.01 mm.
Igbẹhin omi Oofa: Gbigbe ti kii ṣe olubasọrọ fun idagbasoke ti nlọsiwaju (> wakati 72).
3. Eto iṣakoso igbona
Iṣakoso Pipade-Loop PID: Atunse agbara-akoko gidi (50-200 kW) lati mu aaye igbona duro.
Idaabobo Gaasi Inert: Adalu Ar/N₂ (99.999% mimọ) lati ṣe idiwọ ifoyina.
4. Adaṣiṣẹ ati Abojuto
Abojuto Iwọn Iwọn CCD: Awọn esi akoko gidi (ipe ± 0.01 mm).
Thermography infurarẹẹdi: Ṣe abojuto mofoloji ni wiwo olomi to lagbara.
CZ vs KY Ọna lafiwe
Paramita | Ọna CZ | Ọna KY |
O pọju. Iwọn Crystal | 12 inches (300 mm) | 400 mm (ingot ti o ni apẹrẹ pia) |
Àìpé àbùkù | <100/cm² | <50/cm² |
Iwọn idagbasoke | 0,5-5 mm / h | 0.1-2 mm / h |
Lilo Agbara | 50-80 kWh / kg | 80-120 kWh / kg |
Awọn ohun elo | LED sobsitireti, GaN epitaxy | Awọn window opitika, awọn ingots nla |
Iye owo | Iwọntunwọnsi (Idoko-owo ohun elo giga) | Giga (ilana eka) |
Awọn ohun elo bọtini
1. Ile-iṣẹ Semikondokito
Awọn sobusitireti GaN Epitaxial: 2-8-inch wafers (TTV <10 μm) fun Micro-LEDs ati diodes laser.
Awọn Wafers SOI: Irẹjẹ oju oju <0.2 nm fun awọn eerun-iṣọpọ 3D.
2. Optoelectronics
Windows Laser UV: Duro iwuwo agbara 200 W/cm² fun awọn opiti lithography.
Awọn ohun elo infurarẹẹdi: olùsọdipúpọ gbigba <10⁻³ cm⁻¹ fun aworan igbona.
3. Electronics onibara
Awọn ideri Kamẹra Foonuiyara: Mohs lile 9, 10× ilọsiwaju resistance lati ibere.
Awọn ifihan smartwatch: Sisanra 0.3-0.5 mm, gbigbe> 92%.
4. Aabo ati Aerospace
Windows Reactor Iparun: Ifarada Radiation to 10¹⁶ n/cm².
Awọn digi Laser Agbara giga: Ibajẹ gbona <λ/20@1064 nm.
Awọn iṣẹ XKH
1. Isọdi ohun elo
Apẹrẹ Iyẹwu ti iwọn: Φ200-400 awọn atunto mm fun iṣelọpọ wafer 2–12-inch.
Irọrun Doping: Ṣe atilẹyin fun aye to ṣọwọn (Er/Yb) ati irin-iyipada (Ti/Cr) doping fun awọn ohun-ini optoelectronic ti a ṣe.
2. Ipari-si-Ipari Atilẹyin
Iṣapejuwe ilana: Awọn ilana ti a fọwọsi tẹlẹ (50+) fun LED, awọn ẹrọ RF, ati awọn paati-itọsi-lile.
Nẹtiwọọki Iṣẹ Agbaye: Awọn iwadii latọna jijin 24/7 ati itọju lori aaye pẹlu atilẹyin ọja oṣu 24 kan.
3. Sisale ọna
Ṣiṣẹda Wafer: Bibẹ, lilọ, ati didan fun awọn wafers 2–12-inch (C/A-plane).
Awọn ọja ti a fi kun iye:
Awọn ohun elo opitika: Awọn window UV/IR (sisanra 0.5-50 mm).
Awọn ohun elo Igi Jewelry: Cr³⁺ ruby (GIA-ifọwọsi), Ti³⁺ irawọ oniyebiye.
4. Imọ olori
Awọn iwe-ẹri: EMI-ni ifaramọ wafers.
Awọn itọsi: Awọn itọsi mojuto ni isọdọtun ọna CZ.
Ipari
Ohun elo ọna CZ n pese ibaramu iwọn-nla, awọn oṣuwọn abawọn kekere-kekere, ati iduroṣinṣin ilana giga, ti o jẹ ki o jẹ aami ile-iṣẹ fun LED, semikondokito, ati awọn ohun elo aabo. XKH n pese atilẹyin okeerẹ lati imuṣiṣẹ ohun elo si iṣelọpọ lẹhin-idagbasoke, ṣiṣe awọn alabara laaye lati ṣaṣeyọri iye owo-doko, ṣiṣe iṣelọpọ gara oniyebiye oniyebiye.

