12inch Ni kikun Aifọwọyi Dicing Dicing Ri Ohun elo Wafer Ifiṣootọ Eto Ige fun Si/SiC & HBM (Al)
Imọ paramita
Paramita | Sipesifikesonu |
Iwọn iṣẹ | Φ8", Φ12" |
Spindle | Iwọn-meji 1.2/1.8/2.4/3.0, Max 60000 rpm |
Blade Iwon | 2" ~ 3" |
Y1 / Y2 Atẹgun
| Igbesẹ-ẹyọkan: 0.0001 mm |
Ipo deede: <0.002 mm | |
Iwọn gige: 310 mm | |
X igun | Iyara kikọ sii: 0.1-600 mm / s |
Z1 / Z2 Atẹgun
| Igbesẹ-ẹyọkan: 0.0001 mm |
Ipo deede: ≤ 0.001 mm | |
θ Axis | Ipeye ipo: ± 15" |
Cleaning Station
| Iyara Yiyi: 100-3000 rpm |
Ọna mimọ: Fi omi ṣan laifọwọyi & yiyi-gbẹ | |
Ṣiṣẹ Foliteji | 3-alakoso 380V 50Hz |
Awọn iwọn (W×D×H) | 1550× 1255×1880 mm |
Iwọn | 2100 kg |
Ilana Ṣiṣẹ
Ohun elo naa ṣaṣeyọri gige pipe-giga nipasẹ awọn imọ-ẹrọ wọnyi:
1.High-Rigidity Spindle System: Yiyi iyara soke si 60,000 RPM, ti o ni ipese pẹlu awọn okuta iyebiye tabi awọn olori gige laser lati ṣe deede si awọn ohun elo ti o yatọ.
2.Multi-Axis Motion Iṣakoso: X / Y / Z-axis ipo išedede ti ± 1μm, so pọ pẹlu awọn iwọn-giga grating irẹjẹ lati rii daju awọn ọna gige-free iyapa.
3.Intelligent Visual Alignment: CCD-giga-giga (5 megapixels) mọ laifọwọyi gige awọn ita ati ki o isanpada fun awọn ohun elo ija tabi aiṣedeede.
4.Cooling & Dust Removal: Iṣakojọpọ eto itutu agbaiye omi mimọ ati yiyọ eruku igbale igbale lati dinku ipa gbigbona ati idoti patiku.
Awọn ọna gige
1.Blade Dicing: Dara fun awọn ohun elo semikondokito ibile bi Si ati GaAs, pẹlu awọn iwọn kerf ti 50-100μm.
2.Stealth Laser Dicing: Ti a lo fun awọn wafers ultra-thin (<100μm) tabi awọn ohun elo ẹlẹgẹ (fun apẹẹrẹ, LT / LN), ṣiṣe iyapa ti ko ni wahala.
Awọn ohun elo Aṣoju
Ohun elo ibaramu | Aaye Ohun elo | Ilana Awọn ibeere |
Silikoni (Si) | Awọn ICs, awọn sensọ MEMS | Gige-konge gige, chipping <10μm |
Silikoni Carbide (SiC) | Awọn ẹrọ agbara (MOSFET/diodes) | Ige ibajẹ kekere, iṣapeye iṣakoso igbona |
Gallium Arsenide (GaAs) | Awọn ẹrọ RF, awọn eerun optoelectronic | Micro-crack idena, cleanliness Iṣakoso |
LT/LN Sobsitireti | SAW Ajọ, opitika modulators | Ige ti ko ni wahala, titọju awọn ohun-ini piezoelectric |
Awọn sobusitireti seramiki | Awọn modulu agbara, apoti LED | Ṣiṣe ohun elo lile-giga, fifẹ eti |
Awọn fireemu QFN/DFN | Ti ni ilọsiwaju apoti | Olona-eerun gige igbakana, ṣiṣe ti o dara ju |
WLCSP Wafers | Iṣakojọpọ ipele wafer | Dicing laisi ibajẹ ti awọn wafers tinrin (50μm) |
Awọn anfani
1. Fireemu kasẹti iyara ti o ga julọ pẹlu awọn itaniji idena ijamba, gbigbe gbigbe ni kiakia, ati agbara atunṣe-aṣiṣe ti o lagbara.
2. Iṣapeye ipo gige gige meji-spindle, imudara iṣẹ ṣiṣe nipasẹ isunmọ 80% ni akawe si awọn eto alapin-ọkan.
3. Awọn skru bọọlu ti a gbe wọle ti o tọ, awọn itọnisọna laini, ati iwọn Y-axis grating ni pipade-loop iṣakoso, n ṣe idaniloju iduroṣinṣin igba pipẹ ti ẹrọ ti o ga julọ.
4. Ikojọpọ adaṣe adaṣe ni kikun / gbigbe silẹ, ipo gbigbe, gige titete, ati ayewo kerf, dinku iwọn iṣẹ oniṣẹ (OP).
5.Gantry-ara spindle iṣagbesori be, pẹlu kan kere meji-abẹfẹlẹ ayeraye ti 24mm, muu gbooro adaptability fun meji-spindle Ige lakọkọ.
Awọn ẹya ara ẹrọ
1.High-precision ti kii-olubasọrọ iga wiwọn.
2.Multi-wafer meji-abẹfẹlẹ gige lori atẹ kan.
3.Automatic calibration, kerf ayewo, ati awọn eto wiwa fifọ abẹfẹlẹ.
4.Supports Oniruuru ilana pẹlu yiyan laifọwọyi alignment aligoridimu.
5.Fault ara-atunse iṣẹ-ṣiṣe ati ki o gidi-akoko olona-ipo ibojuwo.
6.First-ge ayewo agbara lẹhin-ibẹrẹ dicing.
7.Customizable factory adaṣiṣẹ modulu ati awọn miiran iyan awọn iṣẹ.
Awọn iṣẹ ẹrọ
A pese atilẹyin okeerẹ lati yiyan ohun elo si itọju igba pipẹ:
(1) Idagbasoke adani
Ṣeduro abẹfẹlẹ/awọn ojutu gige lesa ti o da lori awọn ohun-ini ohun elo (fun apẹẹrẹ, lile SiC, brittleness GaAs).
Pese idanwo ayẹwo ọfẹ lati rii daju didara gige (pẹlu chipping, iwọn kerf, aiyẹ oju ilẹ, ati bẹbẹ lọ).
(2) Ikẹkọ Imọ-ẹrọ
· Ikẹkọ Ipilẹ: Ṣiṣẹ ohun elo, atunṣe paramita, itọju igbagbogbo.
· Awọn iṣẹ ilọsiwaju: Imudara ilana fun awọn ohun elo eka (fun apẹẹrẹ, gige laisi wahala ti awọn sobusitireti LT).
(3) Lẹhin-Tita Support
· 24/7 Idahun: Awọn iwadii jijin tabi iranlọwọ lori aaye.
Ipese Awọn apakan apoju: Awọn ọpa ti a ti fipamọ, awọn abẹfẹlẹ, ati awọn paati opiti fun rirọpo ni iyara.
· Itọju Idena: Isọdiwọn deede lati ṣetọju deede ati fa igbesi aye iṣẹ fa.

Awọn Anfani Wa
✔ Iriri Ile-iṣẹ: Nṣiṣẹ 300+ semikondokito agbaye ati awọn aṣelọpọ ẹrọ itanna.
✔ Imọ-ẹrọ Ige-eti: Awọn itọsọna laini pipe ati awọn eto servo ṣe idaniloju iduroṣinṣin ti ile-iṣẹ.
✔ Nẹtiwọọki Iṣẹ Agbaye: Ibora ni Esia, Yuroopu, ati Ariwa Amẹrika fun atilẹyin agbegbe.
Fun idanwo tabi awọn ibeere, kan si wa!

